By Humberto Campanella
This groundbreaking e-book will give you a finished knowing of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical method) resonators. For the 1st time anyplace, you discover broad insurance of those units at either the expertise and alertness degrees. This useful reference provides you with information in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the mixing of those units with ordinary CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their program to sensing and RF structures. in addition, this one-stop source seems to be on the major features, changes, and obstacles of FBAR, MEMS, and NEMS units, supporting you to settle on the fitting techniques on your tasks. Over 280 illustrations and greater than one hundred thirty equations aid key subject matters in the course of the ebook.
Read Online or Download Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems) PDF
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Additional resources for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)
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