By Humberto Campanella

This groundbreaking e-book will give you a finished knowing of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical method) resonators. For the 1st time anyplace, you discover broad insurance of those units at either the expertise and alertness degrees. This useful reference provides you with information in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the mixing of those units with ordinary CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their program to sensing and RF structures. in addition, this one-stop source seems to be on the major features, changes, and obstacles of FBAR, MEMS, and NEMS units, supporting you to settle on the fitting techniques on your tasks. Over 280 illustrations and greater than one hundred thirty equations aid key subject matters in the course of the ebook.

Show description

Read Online or Download Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems) PDF

Similar microelectronics books

Applied Signal Processing: A MATLAB™-Based Proof of Concept (Signals and Communication Technology (Paperback))

Utilized sign Processing: A MATLAB-Based facts of thought merits readers by means of together with the instructing historical past of specialists in quite a few utilized sign processing fields and proposing them in a project-oriented framework. not like many different MATLAB-based textbooks which merely use MATLAB to demonstrate theoretical facets, this e-book offers totally commented MATLAB code for operating proofs-of-concept.

IQ Calibration Techniques for CMOS Radio Transceivers (Analog Circuits and Signal Processing)

The 802. 11n instant average makes use of 64-state quadrature amplitude modulation (64-QAM) to accomplish better spectral potency. therefore, the transmitter and receiver require a better sign to noise ratio with an identical point of mistakes price functionality. This publication bargains a fully-analog reimbursement procedure with out baseband circuitry to manage the calibration strategy.

Trusted Platform Module Basics: Using TPM in Embedded Systems (Embedded Technology)

* transparent, sensible educational kind textual content with real-world purposes * First ebook on TPM for embedded designers * presents a legitimate starting place at the TPM, aiding designers make the most of safeguard in keeping with sound TCG criteria* Covers the entire TPM fundamentals, discussing intimately the TPM Key Hierarchy and the relied on Platform Module specification* offers a strategy to permit designers and builders to effectively combine the TPM into an embedded layout and make sure the TPM's operation on a particular platform· This sound starting place at the TPM offers transparent, useful tutorials with special real-world program examples· the writer is reknowned for education embedded platforms builders to effectively enforce the TPM world wide

Picaxe Project Handbook: A Guide to using PICAXE Microcontrollers (Volume 1 Book 2)

The PICAXE microcontroller is a cheap tiny laptop sitting in a microchip. it may be programmed via you to manage devices, your innovations or your creations and the record of those are never-ending. Your rules or mind's eye is your in basic terms proscribing issue. Alarm platforms, keypad access structures, digital cube, video games and color sensors are yet a couple of.

Additional resources for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)

Example text

And M. Esashi, “Effect of Ion Attachment on Mechanical Dissipation of a Resonator,” Appl. Phys. , Vol. 87, 2005, 044105. , “Internal Friction in Solids, I: Theory of Internal Friction in Reeds,” Phys. , Vol. 52, 1937, pp. 230–235. , “Internal Friction in Solids, I: General Theory of Thermoelastic Internal Friction,” Phys. , Vol. 53, 1938, pp. 90–99. , “Engineering MEMS Resonators with Low Thermoelastic Damping,” J. Microelectromech. , Vol. 15, 2006, pp. 1437–1445. , “A Class of Micromachined Magnetic Resonator for High-Frequency Magnetic Sensor Applications,” J.

Micromech. , Vol. 9, 1999, pp. 190–193. [67] Coburn, J. , and H. F. Winters, “Ion- and Electron-Assisted Gas-Surface Chemistry: An Important Effect in Plasma Etching,” J. Appl. , Vol. 50, 1979, pp. 3189–3196. [68] Benítez, M. , “A New Process for Releasing Micromechanical Structures in Surface Micromachining,” J. Micromech. , Vol. 6, 1996, pp. 36–38. , “A Surface Micromachining Process for the Development of a Medium-Infrared Tuneable Fabry-Perot Interferometer,” Sens. , Vol. 113, 2004, pp. 39–47.

99, 2006, 08B309. [34] Greywall, D. , “Sensitive Magnetometer Incorporating a High-Q Nonlinear Mechanical Resonator,” Meas. Sci. , Vol. 16, 2005, pp. 2473–2482. , Vol. 8, 2008, pp. 373–3738. [36] Vasquez, D. , and J. W. Judy, “Flexure-Based Nanomagnetic Actuators and Their Ultimate Scaling Limits,” Proc. IEEE Intl. Conf. MEMS 2008, Tucson, AZ, January 13–17, 2008, pp. 737–741. , X. Bai, and Y. Zhang, “In Situ Mechanical Properties of Individual ZnO Nanowires and the Mass Measurement of Nanoparticles,” J.

Download PDF sample

Rated 4.25 of 5 – based on 8 votes